New Micronic pattern generation tool combines throughput, resolution for TFT photomask applications
12/4/2001 10:00 AM EST
New Micronic pattern generation tool combines throughput, resolution for
TFT photomask applications
Täby, Sweden -- December 4, 2001 -- Micronic Laser Systems AB (OM
Stockholm Exchange: MICR), a leading manufacturer of laser pattern
generation equipment to the semiconductor and display industries, today
introduced the LRS11000-TFT2, a leading edge display photomask pattern
generation system designed specifically for the increasingly small
transistor features of TFT photomasks.
High resolution is essential to meet the increasingly complex
specifications for TFT photomasks. The LRS11000-TFT2 provides cutting
edge resolution while maintaining the throughput needed for cost
effective manufacturing. The system features five laser exposure beams,
as well as improved registration and CD uniformity. The LRS11000-TFT2
also incorporates powerful data handling capabilities that allow complex
patterns to be processed quickly, eliminating delays during exposure and
maintaining image quality.
"Micronic's LRS11000-TFT2 provides across-the-board improvements over
previous generations of the LRS11000 tools, including resolution and
datapath," said Ulf Sundström, Micronic vice president for sales &
customer support. "With a maximum plate size of 1100 by 1100 mm and 900
by 1200 mm, the system is large enough to accommodate the latest
generation of both TFT and color filter photomasks."
About Micronic Laser Systems AB
Micronic Laser Systems AB is a Swedish high-tech company engaged in the
development, manufacture and marketing of a series of extremely accurate
laser pattern generators for the production of photomasks. The
technology involved is known as microlithography. Micronic's systems are
used by the world's leading electronics companies in the manufacture of
television and computer displays, semiconductor circuits and
semiconductor packaging components.
Micronic is located in Täby, north of Stockholm and at present has
subsidiaries in the United States and Japan and a service office in
Taiwan. Micronic's net sales for 2000 amounted to MSEK 704 (MSEK 213 in
1999) and the company has 325 employees. Micronic maintains a web site
at: http://www.micronic.se
Company Contact: Agency Contact:
Ulf Sundström Dylan McGrath
VP Sales & Customer Support The Loomis Group, Inc.
+46 8 638 52 00 (415) 882-9494