Micronic Sigma7300 laser pattern generator combines resolution and throughput to lower the cost of photomasks
12/2/2002 8:27 AM EST
Micronic Sigma7300 laser pattern generator combines resolution and
throughput to lower the cost of photomasks
Täby - December 2, 2002 - Micronic Laser Systems AB (OM Stockholm
Exchange: MICR), a leading manufacturer of laser pattern generation
equipment for the semiconductor and display industries, today introduced
the Sigma7300, a laser pattern generator with resolution and pattern
accuracy targeted for volume production at the 90 and 65 nm technology
nodes. The tool offers cutting-edge resolution capable of writing
photomasks for critical layers in short write times to reduce turnaround
and lower the cost of masks.
"The Sigma7300 offers the resolution, pattern accuracy, fidelity and
tuning capability to allow customers to write many of the critical layer
masks that have traditionally been written with electron-beam pattern
generators," said Jorge Freyer, Micronic's Sr. vice president for
marketing and business development. "This tool vaults Micronic beyond
the traditional laser pattern generator market and well into the e-beam
segment."
The Sigma7300 works like a micro-stepper with a programmable mask. It is
based on Micronic's exclusive spatial light modulator (SLM) technology.
The SLM is an integrated circuit with a flat, mirror-like surface. Deep
ultraviolet light is reflected off the surface of the SLM to expose
photoresist on a photomask blank, forming the pattern of the mask.
The Sigma7300 features a new, modular platform with an ultra-clean
environment and a standard mechanical interface (SMIF) material
interface. The tool uses a 248 nm laser with 2 kHz flash rate and a 0.82
numerical aperture. The Sigma7300 employs many of the same resolution
enhancement techniques that wafer steppers use in order to achieve
maximum resolution and critical dimension control. A high-precision
alignment system for writing the second layer of phase shift masks is
also available.
Company contact: Agency contact:
Ulf Sundstrom Dylan McGrath
Sr. Vice President, Customer Operation The Loomis Group, Inc.
Tel: +46 8 638 52 00 Tel: +1 415 882 9494
About Micronic Laser Systems AB
Micronic Laser Systems is a Swedish high-tech company engaged in the
development, manufacture and marketing of a series of extremely accurate
laser pattern generators for the production of photomasks. The
technology involved is known as microlithography. Micronic´s systems are
used by the world´s leading electronics companies in the manufacture of
television and computer displays, semiconductor circuits and
semiconductor packaging components. Micronic is located in Taby, north
of Stockholm and at present has subsidiaries in the United States, Japan
and Taiwan. Micronic maintains a web site at: http://www.micronic.se